Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11531274 | Method of determining information about a patterning process, method of reducing error in measurement data, method of calibrating a metrology process, method of selecting metrology targets | Maria Isabel De La Fuente Valentin, Martijn Jongen, Giulio BOTTEGAL, Thomai Zacharopoulou | 2022-12-20 |
| 11506566 | Method of processing data, method of obtaining calibration data | Maria Isabel De La Fuente Valentin, Satej Subhash KHEDEKAR, Bert Verstraeten, Bastiaan Onne Fagginer Auer | 2022-11-22 |
| 10585048 | Method of determining a value of a parameter of interest of a target formed by a patterning process | Samee Ur Rehman, Anagnostis Tsiatmas, Sergey Tarabrin, Joannes Jitse Venselaar, Alexandru ONOSE | 2020-03-10 |
| 10585354 | Method of optimizing a metrology process | Anagnostis Tsiatmas, Joannes Jitse Venselaar, Samee Ur Rehman, Bastiaan Onne Fagginger Auer, Martijn Maria Zaal +1 more | 2020-03-10 |
| 10571363 | Method of determining an optimal focus height for a metrology apparatus | Anagnostis Tsiatmas, Hugo Augustinus Joseph Cramer, Martinus Hubertus Maria Van Weert, Bastiaan Onne Fagginger Auer, Xiaoxin Shang +2 more | 2020-02-25 |
| 10488768 | Beat patterns for alignment on small metrology targets | Bastiaan Onne Fagginger Auer, Paul Christiaan Hinnen, Hugo Augustinus Joseph Cramer, Anagnostis Tsiatmas | 2019-11-26 |