Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11947269 | Method and apparatus to determine a patterning process parameter | Anagnostis Tsiatmas, Paul Christiaan Hinnen, Elliott Gerard McNamara, Thomas Theeuwes, Mir Homayoun Shahrjerdy +2 more | 2024-04-02 |
| 11710668 | Method and apparatus to determine a patterning process parameter | Adriaan Johan Van Leest, Anagnostis Tsiatmas, Paul Christiaan Hinnen, Elliott Gerard McNamara, Alok Verma +5 more | 2023-07-25 |
| 11531274 | Method of determining information about a patterning process, method of reducing error in measurement data, method of calibrating a metrology process, method of selecting metrology targets | Mariya Vyacheslavivna Medvedyeva, Martijn Jongen, Giulio BOTTEGAL, Thomai Zacharopoulou | 2022-12-20 |
| 11506566 | Method of processing data, method of obtaining calibration data | Mariya Vyacheslavivna Medvedyeva, Satej Subhash KHEDEKAR, Bert Verstraeten, Bastiaan Onne Fagginer Auer | 2022-11-22 |
| 11143972 | Method and apparatus to determine a patterning process parameter | Anagnostis Tsiatmas, Paul Christiaan Hinnen, Elliott Gerard McNamara, Thomas Theeuwes, Mir Homayoun Shahrjerdy +2 more | 2021-10-12 |
| 10811323 | Method and apparatus to determine a patterning process parameter | Adriaan Johan Van Leest, Anagnostis Tsiatmas, Paul Christiaan Hinnen, Elliott Gerard McNamara, Alok Verma +5 more | 2020-10-20 |