Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11531274 | Method of determining information about a patterning process, method of reducing error in measurement data, method of calibrating a metrology process, method of selecting metrology targets | Mariya Vyacheslavivna Medvedyeva, Maria Isabel De La Fuente Valentin, Giulio BOTTEGAL, Thomai Zacharopoulou | 2022-12-20 |