Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11994806 | Metrology method and apparatus, computer program and lithographic system | Remco Dirks, Roger Hubertus Elisabeth Clementine Bosch, Sander Silvester Adelgondus Marie JACOBS, Frank Jaco BUIJNSTERS, Siebe Tjerk De Zwart +2 more | 2024-05-28 |
| 11556060 | Method of calibrating a plurality of metrology apparatuses, method of determining a parameter of interest, and metrology apparatus | Seyed Iman Mossavat, Bastiaan Onne Fagginger Auer, Remco Dirks, Hugo Augustinus Joseph Cramer | 2023-01-17 |
| 10585048 | Method of determining a value of a parameter of interest of a target formed by a patterning process | Samee Ur Rehman, Anagnostis Tsiatmas, Sergey Tarabrin, Joannes Jitse Venselaar, Mariya Vyacheslavivna Medvedyeva | 2020-03-10 |
| 10429746 | Estimation of data in metrology | Seyed Iman Mossavat, Thomas Theeuwes | 2019-10-01 |