Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method of calibrating a plurality of metrology apparatuses, method of determining a parameter of interest, and metrology apparatus

Method of calibrating a plurality of metrology apparatuses, method of determining a parameter of interest, and metrology apparatus

US Patent 11556060 · Granted Jan 17, 2023

Estimated economic value: $56,072,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method for filtering an image and associated metrology apparatus2025
Method and apparatus to determine a patterning process parameter2025
Methods of modelling systems for performing predictive maintenance of systems, s2025
Method and apparatus to determine a patterning process parameter using a unit ce2024
Method for process metrology2024
Metrology method and apparatus, computer program and lithographic system2024
Metrology method and apparatus, computer program and lithographic system2024
Metrology targets2024
Metrology apparatus2024
Method and apparatus to determine a patterning process parameter2023
Method and apparatus to determine a patterning process parameter2023
Method and apparatus to determine a patterning process parameter2023