Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11137695 | Method of determining a height profile, a measurement system and a computer readable medium | Arend Johannes Donkerbroek, Jeroen COTTAAR, Thomas Theeuwes | 2021-10-05 |
| 11099489 | Method of measuring a parameter of a lithographic process, metrology apparatus | Hugo Augustinus Joseph Cramer, Hilko Dirk Bos, Armand Eugene Albert Koolen, Han-Kwang Nienhuys, Alessandro Polo +2 more | 2021-08-24 |
| 10558130 | Methods for controlling lithographic apparatus, lithographic apparatus and device manufacturing method | Rene Marinus Gerardus Johan Queens, Reiner Maria Jungblut | 2020-02-11 |
| 10474043 | Method of measuring a property of a substrate, inspection apparatus, lithographic system and device manufacturing method | Patrick Warnaar, Maurits Van Der Schaar, Grzegorz Grzela, Victor Emanuel Calado, Si-Han Zeng | 2019-11-12 |
| 10274849 | Methods for controlling lithographic apparatus, lithographic apparatus and device manufacturing method | Rene Marinus Gerardus Johan Queens, Reiner Maria Jungblut | 2019-04-30 |
| 9488465 | Level sensor, a method for determining a height map of a substrate using a selected resolution, and a lithographic apparatus | Laurent Khuat Duy, Martinus Cornelis Reijnen, Lukasz Jerzy Macht | 2016-11-08 |
| 8208118 | Method for determining exposure settings, lithographic exposure apparatus, computer program and data carrier | David Warren Burry, Ralph Brinkhof, Frank Staals, Robert Franken | 2012-06-26 |