Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11994845 | Determining a correction to a process | Sarathi ROY, Edo Maria Hulsebos, Roy Werkman | 2024-05-28 |
| 11086305 | Determining a correction to a process | Sarathi ROY, Edo Maria Hulsebos, Roy Werkman | 2021-08-10 |
| 8729492 | Methods, devices, and systems for manipulating charged particle streams | John G. Hartley, Gregory Denbeaux | 2014-05-20 |
| 8111379 | Automated determination of height and tilt of a substrate surface within a lithography system | — | 2012-02-07 |