Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Methods and apparatus for controlling a lithographic process

Methods and apparatus for controlling a lithographic process

US Patent 12366809 · Granted Jul 22, 2025

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method for optimizing a sampling scheme and associated apparatuses2025
Determining a correction to a process2025
Determining a correction to a process2025
Metrology method and associated metrology and lithographic apparatuses2025
Determining lithographic matching performance2025
Methods and apparatus for obtaining diagnostic information relating to an indust2025
Method for controlling a semiconductor manufacturing process2025
Method of wafer alignment using at resolution metrology on product features2024
Computational metrology based sampling scheme2024
Determining a correction to a process2024
Determining a correction to a process2024
Methods and apparatus for obtaining diagnostic information relating to an indust2024