Method for controlling a semiconductor manufacturing process

Assignee

• Asml Netherlands B.V.

Inventors

• Marc Hauptmann (15 patents)
• Cornelis Johannes Henricus LAMBREGTS (4 patents)
• Amir Bin Ismail (3 patents)
• Rizvi Rahman (7 patents)
• Allwyn Boustheen (1 patents)
• Raheleh Pishkari (1 patents)
• Everhardus Cornelis Mos (75 patents)
• Ekaterina Mikhailovna Viatkina (3 patents)
• Roy Werkman (25 patents)
• Ralph Brinkhof (20 patents)

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