Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12276919 | Method for controlling a semiconductor manufacturing process | Marc Hauptmann, Cornelis Johannes Henricus LAMBREGTS, Amir Bin Ismail, Rizvi Rahman, Allwyn Boustheen +4 more | 2025-04-15 |
| 11709432 | Method to characterize post-processing data in terms of individual contributions from processing stations | Wim Tjibbo Tel, Tom Van Hemert | 2023-07-25 |
| 11048174 | Method of controlling a patterning process, lithographic apparatus, metrology apparatus lithographic cell and associated computer program | Michael Kubis, Marinus Jochemsen, Richard S. Wise, Nader Shamma, Girish Dixit +3 more | 2021-06-29 |