Issued Patents All Time
Showing 26–36 of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7715019 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Goce Naumoski | 2010-05-11 |
| 7692792 | Method and apparatus for angular-resolved spectroscopic lithography characterization | Arie Jeffrey Den Boef, Stefan Carolus Jacobus Antonius Keij | 2010-04-06 |
| 7630087 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Leonardus Henricus Marie Verstappen, Goce Naumoski | 2009-12-08 |
| 7605907 | Method of forming a substrate for use in calibrating a metrology tool, calibration substrate and metrology tool calibration method | Hugo Augustinus Joseph Cramer, Gerardus Maria Johannes Wijnand Janssen | 2009-10-20 |
| 7596420 | Device manufacturing method and computer program product | Johannes Anna Quaedackers | 2009-09-29 |
| 7532331 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Goce Naumoski | 2009-05-12 |
| 7532307 | Focus determination method, device manufacturing method, and mask | Maurits Van Der Schaar, Arie Jeffrey Den Boef, Mircea Dusa | 2009-05-12 |
| 7443486 | Method for predicting a critical dimension of a feature imaged by a lithographic apparatus | Koen Van Ingen Schenau, Maurice Henricus Franciscus Janssen, Hans Van Der Laan, Peter Clement Paul Vanoppen | 2008-10-28 |
| 7312860 | Test pattern, inspection method, and device manufacturing method | Arie Jeffrey Den Boef, Hans Van Der Laan, Antonius Johannes Josephus Van Dijsseldonk, Mircea Dusa | 2007-12-25 |
| 7151594 | Test pattern, inspection method, and device manufacturing method | Arie Jeffrey Den Boef, Hans Van Der Laan, Antonius Johannes Josephus Van Dijsseldonk, Mircea Dusa | 2006-12-19 |
| 7112813 | Device inspection method and apparatus using an asymmetric marker | Arie Jeffrey Den Boef, Frank Bornebroek, Hugo Augustinus Joseph Cramer, Mircea Dusa, Richard Johannes Franciscus Van Haren +7 more | 2006-09-26 |