| 8755030 |
Lithographic apparatus and device manufacturing method |
Christiaan Louis Valentin, Antonius Franciscus Johannes De Groot, Robert-Han Munnig Schmidt, Bartholomeus Catharina Thomas Van Bree |
2014-06-17 |
| 8736815 |
Position sensor and lithographic apparatus |
Ruud Antonius Catharina Maria Beerens, Antonius Franciscus Johannes De Groot |
2014-05-27 |
| 8685295 |
Imprint lithography apparatus |
Andre Bernardus Jeunink, Yvonne Wendela Kruijt-Stegeman |
2014-04-01 |
| 8687171 |
Electromagnetic actuator, stage apparatus and lithographic apparatus |
Sven Antoin Johan Hol, Jan Van Eijk, Gerard Johannes Pieter Nijsse, Simon Bernardus Cornelis Maria Martens, Yang-Shan Huang +4 more |
2014-04-01 |
| 8597014 |
Actuator |
Theodorus Petrus Maria Cadee, Noud Jan Gilissen |
2013-12-03 |
| 8482719 |
Positioning system, lithographic apparatus and method |
Jan Van Eijk, Engelbertus Antonius Fransiscus Van Der Pasch |
2013-07-09 |
| 8368868 |
Lithographic apparatus with gas pressure means for controlling a planar position of a patterning device contactless |
Marcel Koenraad Marie Baggen, Hans Butler, Henrikus Herman Marie Cox, Jan Van Eijk, Andre Bernardus Jeunink +7 more |
2013-02-05 |
| 8345218 |
Immersion lithographic apparatus, drying device, immersion metrology apparatus and device manufacturing method |
Michel Riepen, Nicolaas Rudolf Kemper, Daniel Jozef Maria Direcks, Danny Maria Hubertus Philips, Arnold Jan Van Putten |
2013-01-01 |
| 8334983 |
Lithographic apparatus and device manufacturing method |
Ruud Antonius Catharina Maria Beerens, Sjoerd Nicolaas Lambertus Donders, Engelbertus Antonius Fransiscus Van Der Pasch, Fransiscus Mathijs Jacobs |
2012-12-18 |
| 8319968 |
Imprint lithography |
Arie Jeffrey Den Boef, Andre Bernardus Jeunink, Pascal Antonius Smits, Sander Frederik Wuister, Yvonne Wendela Kruijt-Stegeman +1 more |
2012-11-27 |
| 8043085 |
Imprint lithography |
Yvonne Wendela Kruijt-Stegeman, Andre Bernardus Jeunink, Sander Frederik Wuister, Raymond Wilhelmus Louis Lafarre, Catharinus De Schiffart +1 more |
2011-10-25 |
| 7576831 |
Method and apparatus for maintaining a machine part |
Pieter Johannes Marius Van Groos, Jan Frederik Hoogkamp, Josephus Cornelius Johannes Antonius Vugts, Robert Gordon Livesey, Johannes Hendrikus Gertrudis Franssen +2 more |
2009-08-18 |
| 7486384 |
Lithographic support structure |
Patricius Aloysius Jacobus Tinnemans, Edwin Johan Buis, Sjoerd Nicolaas Lambertus Donders, Jan Van Elp, Jan Frederik Hoogkamp +8 more |
2009-02-03 |
| 7397040 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby |
Johannes C. Driessen, Hermanus M. J. R. Soemers, Michael J. M. Renkens, Theodorus Hubertus Josephus Bisschops, Antonius Maria Rijken |
2008-07-08 |
| 7105955 |
Lithographic apparatus, coil assembly, positioning device including a coil assembly, and device manufacturing method |
Henricus Wilhelmus Aloysius Janssen, Erik Roelof Loopstra |
2006-09-12 |
| 7084953 |
Lithographic apparatus, device manufacturing method and device manufactured thereby |
Johannes C. Driessen, Hermanus M. J. R. Soemers, Michael J. M. Renkens, Theodorus Hubertus Josephus Bisschops, Antonius Maria Rijken |
2006-08-01 |
| 6926588 |
Band coil |
Henricus Wilhelmus Aloysius Janssen, Fransiscus Marinus Andrea Maria Van Gaal, Petrus Carolus Maria Frissen |
2005-08-09 |
| 6740891 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby |
Johannes C. Driessen, Hermanus M. J. R. Soemers, Michael J. M. Renkens, Theodorus Hubertus Josephus Bisschops, Antonius Maria Rijken |
2004-05-25 |
