| 10192772 |
Substrate table and lithographic apparatus |
Satish Achanta, Tiannan GUAN, Raymond Wilhelmus Louis Lafarre, Ilya MALAKHOVSKY, Bas Johannes Petrus ROSET +1 more |
2019-01-29 |
| 10001713 |
Lithographic apparatus and method |
Santiago del Puerto, Matthew Lipson, Kenneth C. Henderson, Raymond Wilhelmus Louis Lafarre, Louis John Markoya +3 more |
2018-06-19 |
| 9726985 |
Stage system and a lithographic apparatus |
Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Antonius Franciscus Johannes De Groot, Theodorus Petrus Maria Cadee, Robertus Mathijs Gerardus Rijs, Richard Henricus Adrianus Van Lieshout |
2017-08-08 |
| 9726988 |
Multi-stage system, a control method therefor, and a lithographic apparatus |
Hans Butler |
2017-08-08 |
| 9715171 |
Imprint lithographic apparatus and imprint lithographic method |
Hans Butler, Marc Wilhelmus Maria Van Der Wijst, Jeroen Pieter Starreveld, Cornelius Adrianus Lambertus De Hoon, Francois Xavier Debiesme |
2017-07-25 |
| 9507277 |
Lithographic apparatus and device manufacturing method |
Wilhelmus Henricus Theodorus Maria Aangenent, Ruud Antonius Catharina Maria Beerens, Rick Scholte, Ines Lopez Arteaga |
2016-11-29 |
| 9442394 |
Multi-stage system, a control method therefor, and a lithographic apparatus |
Hans Butler |
2016-09-13 |
| 9410796 |
Lithographic apparatus and method |
Ruud Antonius Catharina Maria Beerens, Engelbertus Antonius Fransiscus Van Der Pasch, Theodorus Petrus Maria Cadee, Raymond Wilhelmus Louis Lafarre |
2016-08-09 |
| 9372396 |
Imprint lithography method |
Yvonne Wendela Kruijt-Stegeman, Andre Bernardus Jeunink |
2016-06-21 |
| 9329501 |
Lithographic apparatus, method of deforming a substrate table and device manufacturing method |
Yang-Shan Huang, Hans Butler, Jan Van Eijk, Sven Antoin Johan Hol, Engelbertus Antonius Fransiscus Van Der Pasch +3 more |
2016-05-03 |
| 9268211 |
Lithographic apparatus, and patterning device for use in a lithographic process |
Jan Van Eijk, Engelbertus Antonius Fransiscus Van Der Pasch |
2016-02-23 |
| 9141003 |
Lithographic apparatus and device manufacturing method |
Ruud Antonius Catharina Maria Beerens, Sjoerd Nicolaas Lambertus Donders, Engelbertus Antonius Fransiscus Van Der Pasch, Bastiaan Lambertus Wilhelmus Marinus Van De Ven |
2015-09-22 |
| 9141004 |
Lithographic apparatus and method |
Johannes Antonius Gerardus Akkermans, Marinus Maria Johannes Van De Wal, Ruud Antonius Catharina Maria Beerens, Yang-Shan Huang, Wilhelmus Henricus Theodorus Maria Aangenent |
2015-09-22 |
| 9128390 |
Multi-stage system, a control method therefor, and a lithographic apparatus |
Hans Butler |
2015-09-08 |
| 9116423 |
Imprint lithography apparatus |
Andre Bernardus Jeunink, Vadim Yevgenyevich Banine, Hans Butler, Engelbertus Antonius Fransiscus Van Der Pasch, Yvonne Wendela Kruijt-Stegeman |
2015-08-25 |
| 9110387 |
Lithographic apparatus comprising a substrate table and a surface substrate actuator |
Hans Butler, Jan Van Eijk, Sven Antoin Johan Hol, Yang-Shan Huang |
2015-08-18 |
| 9081307 |
Variable reluctance device, stage apparatus, lithographic apparatus and device manufacturing method |
Sven Antoin Johan Hol, Wilhelmus Henricus Theodorus Maria Aangenent, George Wilhelmus Johannes Clijsen, Johannes Antonius Gerardus Akkermans, Jacob Kornelis Ter Veer +1 more |
2015-07-14 |
| 9041913 |
Lithographic apparatus and device manufacturing method with bearing to allow substrate holder to float with respect to substrate table |
— |
2015-05-26 |
| 9019470 |
Lithographic apparatus, and patterning device for use in a lithographic process |
Jan Van Eijk, Engelbertus Antonius Fransiscus Van Der Pasch |
2015-04-28 |
| 8982359 |
System for detecting motion, lithographic apparatus and device manufacturing method |
Jan Van Eijk, Erik Roelof Loopstra, Engelbertus Antonius Fransiscus Van Der Pasch |
2015-03-17 |
| 8947640 |
Positioning device, lithographic apparatus, positioning method and device manufacturing method |
Raymond Wilhelmus Louis Lafarre, Henrikus Herman Marie Cox, Antonius Franciscus Johannes De Groot |
2015-02-03 |
| 8932042 |
Lithographic apparatus and device manufacturing method |
Antonius Franciscus Johannes De Groot, Theodorus Petrus Maria Cadee, Jeroen De Boeij |
2015-01-13 |
| 8913229 |
Multi-stage system, a control method therefor, and a lithographic apparatus |
Hans Butler |
2014-12-16 |
| 8896811 |
Positioning system and a method for positioning a substage with respect to a frame |
Sven Antoin Johan Hol, Jan Van Eijk, Antonius Franciscus Johannes De Groot, Geert-Jan Petrus Naaijkens, Marijn Kessels +1 more |
2014-11-25 |
| 8845320 |
Imprint lithography apparatus |
Catharinus De Schiffart, Andre Bernardus Jeunink, Sander Frederik Wuister, Yvonne Wendela Kruijt-Stegeman, Norbert Erwin Therenzo Jansen |
2014-09-30 |
