Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11550231 | Apparatus for and method of in-situ particle removal in a lithography apparatus | Ronald Peter Albright, Daniel Leslie Hall, Victor Antonio PEREZ-FALCON, Andrew Judge | 2023-01-10 |
| 11156928 | Alignment mark for two-dimensional alignment in an alignment system | Gerrit Johannes Nijmeijer, Junqiang Zhou, Piotr Jan Meyer, Igor Matheus Petronella Aarts | 2021-10-26 |