Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11740561 | Metrology system, lithographic apparatus, and calibration method | Nikhil Mehta | 2023-08-29 |
| 11156928 | Alignment mark for two-dimensional alignment in an alignment system | Gerrit Johannes Nijmeijer, Junqiang Zhou, Jeffrey John Lombardo, Igor Matheus Petronella Aarts | 2021-10-26 |
| 6002231 | Control by means of a set-point generator | Walrick Dirkx | 1999-12-14 |
| 5412300 | Numerical control device and method for control of movement of a tool | Noel Ripoll-Ensenat | 1995-05-02 |