| 12411425 |
Fluid purging system |
José Nilton Fonseca Junior, Zhuangxiong HUANG, Franciscus Johannes Leonardus Heutz, Henricus Anita Jozef Wilhelmus Van De Ven, Ramo Omerovic +1 more |
2025-09-09 |
|
| 12292696 |
Fluid purging system, projection system, illumination system, lithographic apparatus, and method |
José Nilton Fonseca Junior, Franciscus Johannes Leonardus Heutz, Zhuangxiong HUANG |
2025-05-06 |
|
| 11086239 |
Cleaning device and method of cleaning |
Miao Yu, Petrus Martinus Gerardus Johannes Arts, Erik Henricus Egidius Catharina Eummelen, Giovanni Luca Gattobigio, Maarten Holtrust +3 more |
2021-08-10 |
$38,498,000 |
| 10802410 |
Lithographic apparatus and device manufacturing method involving a barrier structure to handle liquid |
Nicolaas Rudolf Kemper, Marcel Beckers, Stefan Philip Christiaan Belfroid, Sergei Shulepov |
2020-10-13 |
$53,962,000 |
| 10725390 |
Inspection substrate and an inspection method |
Seerwan Saeed, Petrus Martinus Gerardus Johannes Arts, Harold Sebastiaan Buddenberg, Erik Henricus Egidius Catharina Eummelen, Giovanni Luca Gattobigio +8 more |
2020-07-28 |
$31,370,000 |
| 10495984 |
Lithographic apparatus and device manufacturing method |
Marcel Beckers, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate +2 more |
2019-12-03 |
|
| 10216100 |
Inspection substrate and an inspection method |
Seerwan Saeed, Petrus Martinus Gerardus Johannes Arts, Harold Sebastiaan Buddenberg, Erik Henricus Egidius Catharina Eummelen, Giovanni Luca Gattobigio +8 more |
2019-02-26 |
$13,559,000 |
| 10209629 |
Lithographic apparatus and device manufacturing method |
Marcel Beckers, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate +2 more |
2019-02-19 |
$13,622,000 |
| 9857695 |
Lithographic apparatus and device manufacturing method |
Marcel Beckers, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate +2 more |
2018-01-02 |
$9,111,000 |
| 9477158 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Marcel Beckers, Stefan Philip Christiaan Belfroid, Sergei Shulepov |
2016-10-25 |
$7,821,000 |
| 9429853 |
Lithographic apparatus and device manufacturing method |
Marcel Beckers, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate +2 more |
2016-08-30 |
$8,371,000 |
| 8988651 |
Lithographic apparatus and device manufacturing method |
Marcel Beckers, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate +2 more |
2015-03-24 |
$8,622,000 |
| 8976334 |
Lithographic apparatus and device manufacturing method |
Marcel Beckers, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate +2 more |
2015-03-10 |
$5,858,000 |
| 8958054 |
Lithographic apparatus and device manufacturing method |
Marcel Beckers, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate |
2015-02-17 |
$9,451,000 |
| 8259287 |
Lithographic apparatus and device manufacturing method |
Marcel Beckers, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate +2 more |
2012-09-04 |
$7,167,000 |
| 8004654 |
Lithographic apparatus and device manufacturing method |
Marcel Beckers, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate |
2011-08-23 |
$4,279,000 |
| 7411654 |
Lithographic apparatus and device manufacturing method |
Marcel Beckers, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate +2 more |
2008-08-12 |
$1,657,000 |
| 7411658 |
Lithographic apparatus and device manufacturing method |
Marcel Beckers, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate |
2008-08-12 |
$1,657,000 |
| 7130019 |
Lithographic apparatus and device manufacturing method |
Petrus Rutgerus Bartray, Wilhelmus Josephus Box, Carlo Cornelis Maria Luijten, Bernardus Antonius Johannes Luttikhuis, Michael Ten Bhomer +1 more |
2006-10-31 |
$6,990,000 |
