Lithographic apparatus and device manufacturing method

Assignee

• Asml Netherlands B.V.

Inventors

• Marcel Beckers (38 patents)
• Sjoerd Nicolaas Lambertus Donders (233 patents)
• Christiaan Alexander Hoogendam (192 patents)
• Johannes Henricus Wilhelmus Jacobs (91 patents)
• Nicolaas Ten Kate (134 patents)
• Nicolaas Rudolf Kemper (91 patents)
• Ferdy Migchelbrink (19 patents)
• Elmar Evers (8 patents)

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