Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder

Assignee

• Asml Netherlands B.V.

Inventors

• Raymond Wilhelmus Louis Lafarre (82 patents)
• Sjoerd Nicolaas Lambertus Donders (233 patents)
• Nicolaas Ten Kate (134 patents)
• Nina Vladimirovna Dziomkina (38 patents)
• Yogesh Pramod Karade (26 patents)
• Elisabeth Corinne Rodenburg (19 patents)

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