Substrate support and substrate table

Assignee

• Asml Netherlands B.V.

Inventors

• Coen Hubertus Matheus Baltis (13 patents)
• Nicolaas Ten Kate (134 patents)
• Marcus Martinus Petrus Adrianus Vermeulen (19 patents)
• Siegfried Alexander Tromp (23 patents)
• Frank Pieter Albert Van Den Berkmortel (7 patents)
• Niek Jacobus Johannes Roset (25 patents)
• Gijs Kramer (15 patents)
• Nicolaas Petrus Marcus Brantjes (2 patents)
• Michiel Theodorus Jacobus Fonteyn (1 patents)

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