Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8477289 | Position measurement using natural frequency vibration of a pattern | Johan Geerke, Igor Matheus Petronella Aarts | 2013-07-02 |
| 8446564 | Lithographic apparatus and device manufacturing method | Gerardus Carolus Johannus Hofmans, Bart Peter Bert Segers | 2013-05-21 |