Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9316924 | Lithographic apparatus, excimer laser and device manufacturing method | Robertus Cornelis Martinus De Kruif, Richard Joseph Bruls, Erik Petrus Buurman | 2016-04-19 |
| 8089613 | Lithographic apparatus, excimer laser and device manufacturing method | Robertus Cornelis Martinus De Kruif, Richard Joseph Bruls, Erik Petrus Buurman | 2012-01-03 |
| 7817247 | Lithographic apparatus, excimer laser and device manufacturing method | Robertus Cornelis Martinus De Kruif, Richard Joseph Bruls, Erik Petrus Buurman | 2010-10-19 |
| 7655367 | Lithographic apparatus and device manufacturing method | Erik Petrus Buurman, Thomas Josephus Maria Castenmiller, Bearrach Moest, Marc Antonius Maria Haast | 2010-02-02 |
| 7525638 | Lithographic apparatus and device manufacturing method | Erik Petrus Buurman, Thomas Josephus Maria Castenmiller, Bearrach Moest, Mare Antonius Maria Haast | 2009-04-28 |