Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8154708 | Lithographic apparatus and device manufacturing method | Joeri Lof, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +16 more | 2012-04-10 |
| 7453078 | Sensor for use in a lithographic apparatus | Haico Victor Kok, Borgert Kruizinga, Timotheus Franciscus Sengers, Bearrach Moest, Marc Antonius Maria Haast +3 more | 2008-11-18 |
| 7282701 | Sensor for use in a lithographic apparatus | Haico Victor Kok, Borgert Kruizinga, Timotheus Franciscus Sengers, Bearrach Moest, Marc Antonius Maria Haast +3 more | 2007-10-16 |
| 6906787 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Wilhelmus Petrus De Boeij, Marcel Maurice Hemerik | 2005-06-14 |