Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10295913 | Inspection method and apparatus, and corresponding lithographic apparatus | Scott Anderson Middlebrooks, Rene A. M. Pluijms, Marc Johannes Noot | 2019-05-21 |
| 9594310 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Marcus Adrianus Van De Kerkhof, Maurits Van Der Schaar, Andreas Fuchs | 2017-03-14 |
| 9594311 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Marcus Adrianus Van De Kerkhof, Maurits Van Der Schaar, Andreas Fuchs | 2017-03-14 |
| 9235141 | Inspection apparatus and method for measuring a property of a substrate | Maurits Van Der Schaar, Arie Jeffrey Den Boef, Everhardus Cornelis Mos, Andreas Fuchs, Hendrik Jan Hidde Smilde | 2016-01-12 |
| 8908147 | Method and apparatus for determining an overlay error | Arie Jeffrey Den Boef, Maurits Van Der Schaar, Andreas Fuchs, Kaustuve Bhattacharyya, Stephen Morgan +1 more | 2014-12-09 |
| 8786825 | Apparatus and method of measuring a property of a substrate | Marcus Adrianus Van De Kerkhof, Maurits Van Der Schaar, Andreas Fuchs | 2014-07-22 |