Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12399000 | Systems and methods for measuring intensity in a lithographic alignment apparatus | Justin Kreuzer, Stephen Roux, Michael L. Nelson, Muhsin Eralp | 2025-08-26 |
| 12393046 | Metrology systems, coherence scrambler illumination sources and methods thereof | Irwan Dani Setija, Arie Jeffrey Den Boef, Arjan Johannes Anton Beukman | 2025-08-19 |
| 12306541 | Lithographic apparatus, metrology systems, illumination switches and methods thereof | Marinus Petrus REIJNDERS | 2025-05-20 |
| 12298257 | Monolithic particle inspection device | Ilse VAN WEPEREN, Arjan Johannes Anton Beukman, Justin Kreuzer, Stephen Roux | 2025-05-13 |
| 12216414 | Self-referencing integrated alignment sensor | Justin Kreuzer, Stephen Roux | 2025-02-04 |
| 12140872 | Optical designs of miniaturized overlay measurement system | Tamer Elazhary, Stephen Roux, Yevgeniy Konstantinovich Shmarev | 2024-11-12 |
| 12135505 | Spectrometric metrology systems based on multimode interference and lithographic apparatus | Justin Kreuzer, Stephen Roux | 2024-11-05 |
| 12124173 | Lithographic apparatus, metrology systems, illumination sources and methods thereof | Marinus Petrus REIJNDERS | 2024-10-22 |
| 12124177 | Overlay measurement system using lock-in amplifier technique | Simon Reinald HUISMAN, Justin Kreuzer | 2024-10-22 |
| 12066762 | On chip sensor for wafer overlay measurement | Stephen Roux, Tamer Elazhary, Arie Jeffrey Den Boef | 2024-08-20 |
| 11994808 | Lithographic apparatus, metrology systems, phased array illumination sources and methods thereof | Tamer Elazhary, Stephen Roux, Yuxiang Lin, Justin Kreuzer | 2024-05-28 |
| 10948627 | Infrared subwavelength focusing in silicon and energy harvesting devices | Manar A. Abdel-Galil, Yehea Ismail | 2021-03-16 |