Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12393046 | Metrology systems, coherence scrambler illumination sources and methods thereof | Arie Jeffrey Den Boef, Mohamed Swillam, Arjan Johannes Anton Beukman | 2025-08-19 |
| 11042096 | Alignment measurement system | Stefan Michiel Witte, Alessandro Antoncecchi, Hao Zhang, Stephen EDWARD, Paulus Clemens Maria PLANKEN +3 more | 2021-06-22 |
| 10948409 | Method and apparatus for calculating electromagnetic scattering properties of finite periodic structures | Petrus Maria Van Den Berg | 2021-03-16 |
| 10942461 | Alignment measurement system | Simon Reinald HUISMAN, Sebastianus Adrianus GOORDEN | 2021-03-09 |
| 10788765 | Method and apparatus for measuring a structure on a substrate | Stefan Michiel Witte, Alessandro Antoncecchi, Stephen EDWARD, Hao Zhang, Paulus Clemens Maria PLANKEN +3 more | 2020-09-29 |
| 10408753 | Method and apparatus for calculating electromagnetic scattering properties of finite periodic structures | Maxim PISARENCO | 2019-09-10 |
| 9939250 | Methods and apparatus for calculating electromagnetic scattering properties of a structure and for estimation of geometrical and material parameters thereof | Maxim PISARENCO | 2018-04-10 |
| 9772562 | Method and apparatus for measuring a structure on a substrate, models for error correction, computer program products for implementing such methods and apparatus | Martijn Peter Mink, Janne Maria Brok | 2017-09-26 |
| 8875078 | Reference library generation method for methods of inspection, inspection apparatus and lithographic apparatus | Maxim PISARENCO | 2014-10-28 |
| 8724109 | Method and apparatus for angular-resolved spectroscopic lithography characterization | Maurits Van Der Schaar | 2014-05-13 |
| 8706455 | Methods and apparatus for calculating electromagnetic scattering properties of a structure using a normal-vector field and for reconstruction of approximate structures | Martijn Constant Van Beurden, Remco Dirks | 2014-04-22 |
| 8645109 | Methods and apparatus for determining electromagnetic scattering properties and structural parameters of periodic structures | Remco Dirks, Markus Gerardus Martinus Maria Van Kraaij, Martijn Constant Van Beurden | 2014-02-04 |
| 8520212 | Scatterometry method and measurement system for lithography | Willem Marie Julia Marcel Coene, Hugo Augustinus Joseph Cramer | 2013-08-27 |
| 8189195 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Arie Jeffrey Den Boef, Hugo Augustinus Joseph Cramer, Mircea Dusa | 2012-05-29 |
| 7643666 | Method and apparatus for angular-resolved spectroscopic lithography characterization | Arie Jeffrey Den Boef | 2010-01-05 |
| 7440079 | Lithographic apparatus, alignment system, and device manufacturing method | Arie Jeffrey Den Boef, Andre Bernardus Jeunink, Henricus Petrus Maria Pellemans, Cas Johannes Petrus Maria VAN NUENEN, Stefan Carolus Jacobus Antonius Keij | 2008-10-21 |
| 7002667 | Lithographic apparatus with alignment subsystem, device manufacturing method, and device manufactured thereby | Leon Martin Levasier, Arie Jeffrey Den Boef, Ingo Dirnstorfer, Andre Bernardus Jeunink, Stefan Geerte Kruijswijk +2 more | 2006-02-21 |
| 6995831 | Lithographic apparatus with alignment subsystem, device manufacturing method, using alignment, and alignment structure | Leon Martin Levasier, Arie Jeffrey Den Boef, Ingo Dirnstorfer, Andre Bernardus Jeunink, Stefan Geerte Kruijswijk +2 more | 2006-02-07 |
| 6987556 | Lithographic projection apparatus, a method for determining a position of a substrate alignment mark, a device manufacturing method and device manufactured thereby | Maurits Van Der Schaar, Everhardus Cornelis Mos | 2006-01-17 |
| 6704089 | Lithographic projection apparatus, a method for determining a position of a substrate alignment mark, a device manufacturing method and device manufactured thereby | Maurits Van Der Schaar, Everhardus Cornelis Mos | 2004-03-09 |