Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7440079 | Lithographic apparatus, alignment system, and device manufacturing method | Arie Jeffrey Den Boef, Andre Bernardus Jeunink, Henricus Petrus Maria Pellemans, Irwan Dani Setija, Stefan Carolus Jacobus Antonius Keij | 2008-10-21 |