Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9772562 | Method and apparatus for measuring a structure on a substrate, models for error correction, computer program products for implementing such methods and apparatus | Janne Maria Brok, Irwan Dani Setija | 2017-09-26 |