Issued Patents All Time
Showing 26–33 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7113258 | Lithographic apparatus | Keith Frank Best, Joseph Consolini, Joeri Lof, Edwin Ross Shafer | 2006-09-26 |
| 7094506 | Lithographic apparatus and device manufacturing method | — | 2006-08-22 |
| 7084955 | Lithographic apparatus | Cheng-Qun Gui, Maurits Van Der Schaar, Arie Jeffrey Den Boef | 2006-08-01 |
| 7064807 | Lithographic apparatus | Cheng-Qun Gui, Maurits Van Der Schaar, Arie Jeffrey Den Boef | 2006-06-20 |
| 7041996 | Method of aligning a substrate, a computer program, a device manufacturing method and a device manufactured thereby | Keith Frank Best, Joseph Consolini, Alexander Friz | 2006-05-09 |
| 6936385 | Calibration methods, calibration substrates, lithographic apparatus and device manufacturing methods | Joeri Lof, Cheng-Qun Gui, Fransiscus Godefridus Casper Bijnen | 2005-08-30 |
| 6914664 | Lithographic apparatus, alignment method and device manufacturing method | Keith Frank Best, Alexander Friz, Joseph Consolini, Cheng-Qun Gui | 2005-07-05 |
| 6618118 | Optical exposure method, device manufacturing method and lithographic projection apparatus | Arthur Winfried Eduardus Minnaert | 2003-09-09 |