Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8497976 | Substrate measurement method and apparatus | Arie Jeffrey Den Boef, Everhardus Cornelis Mos | 2013-07-30 |
| 8482718 | Lithographic apparatus and device manufacturing method | Marcus Adrianus Van De Kerkhof, Haico Victor Kok | 2013-07-09 |
| 7791724 | Characterization of transmission losses in an optical system | Arie Jeffrey Den Boef, Mircea Dusa, Markus Gerardus Martinus Maria Van Kraaij | 2010-09-07 |
| 7480050 | Lithographic system, sensor, and method of measuring properties of a substrate | Arie Jeffrey Den Boef, Mircea Dusa, Reinder Teun Plug | 2009-01-20 |
| 7403293 | Metrology apparatus, lithographic apparatus, process apparatus metrology method and device manufacturing method | Henricus Petrus Maria Pellemans, Arie Jeffrey Den Boef, Hans Van Der Laan | 2008-07-22 |
| 6348303 | Lithographic projection apparatus | Sijbe Abraham Van Der Lei, Rard Willem De Leeuw, Gerrit Maarten Bonnema | 2002-02-19 |