Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7522258 | Lithographic apparatus and device manufacturing method utilizing movement of clean air to reduce contamination | Bernardus Antonius Johannes Luttikhuis, Petrus Rutgerus Bartray, Wilhelmus Josephus Box, Marco Koert Stavenga | 2009-04-21 |
| 7274431 | Lithographic projection apparatus and device manufacturing method | Wilhelmus Josephus Box, Johannes Henricus Wilhelmus Jacobs, Paulus Martinus Maria Liebregts | 2007-09-25 |
| 7126664 | Lithographic apparatus and a device manufacturing method | Bernardus Antonius Johannes Luttikhuis, Petrus Rutgerus Bartray, Johannes Henricus Wilhelmus Jacobs, Paulus Martinus Maria Liebregts | 2006-10-24 |