Issued Patents All Time
Showing 26–26 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6542220 | Purge gas systems for use in lithographic projection apparatus | Raymond Laurentius Johannes Schrijver, Tjarko Adriaan Rudolf Van Empel, Marcel Koenraad Marie Baggen, Yim-Bun Patrick Kwan, Erik Roelof Loopstra | 2003-04-01 |