Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7423722 | Lithographic apparatus and device manufacturing method | Albert Johannes Maria Jansen, Jan Jaap Kuit, Erik Roelof Loopstra | 2008-09-09 |
| 7239370 | Lithographic apparatus and device manufacturing method | Albert Johannes Maria Jansen, Marcel Koenraad Marie Baggen, Johannes Christiaan Maria Jasper, Richard Joseph Bruls, Johannes Jacobus Matheus Baselmans +2 more | 2007-07-03 |
| 6933513 | Gas flushing system for use in lithographic apparatus | Tjarko Adriaan Rudolf Van Empel, Johannes Andreas Henricus Maria Jacobs, Nicolaas Rudolf Kemper, Nicolaas Franciscus Koppelaars | 2005-08-23 |
| 6707530 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Tjarko Adriaan Rudolf Van Empel, Marcel Koenraad Marie Baggen | 2004-03-16 |
| 6542220 | Purge gas systems for use in lithographic projection apparatus | Tjarko Adriaan Rudolf Van Empel, Marcel Koenraad Marie Baggen, Bernardus Antonius Johannes Luttikhuis, Yim-Bun Patrick Kwan, Erik Roelof Loopstra | 2003-04-01 |