Issued Patents All Time
Showing 26–43 of 43 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7310132 | Lithographic apparatus and device manufacturing method | Erik Roelof Loopstra, Fransicus Mathijs Jacobs, Godfried Katharina Hubertus Franciscus Geelen | 2007-12-18 |
| 7292317 | Lithographic apparatus and device manufacturing method utilizing substrate stage compensating | Henrikus Herman Marie Cox, Hernes Jacobs, Petrus Matthijs Henricus Vosters | 2007-11-06 |
| 7256866 | Lithographic apparatus and device manufacturing method | Henrikus Herman Marie Cox, Hans Butler, Ronald Casper Kunst, Youssef Karel Maria De Vos | 2007-08-14 |
| 7256867 | Lithographic apparatus and device manufacturing method | Bernardus Antonius Johannes Luttikhuis, Petrus Matthijs Henricus Vosters | 2007-08-14 |
| 7250237 | Optimized correction of wafer thermal deformations in a lithographic process | Joost Jeroen Ottens, Jeroen Pieter Starreveld, Wouterus Johannes Petrus Maria Maas, Willem Jurrianus Venema, Boris Menchtchikov | 2007-07-31 |
| 7245047 | Lithographic apparatus and device manufacturing method | Patricia Vreugdewater, Henrikus Herman Marie Cox, Sven Antoin Johan Hol | 2007-07-17 |
| 7230254 | Movable carriage for a lithographic apparatus and device manufacturing method | Martinus Arnoldus Henricus Terken, Hernes Jacobs, Petrus Matthijs Henricus Vosters, Koen Jacobus Johannes Maria Zaal | 2007-06-12 |
| 7088428 | Lithographic actuator mechanism, lithographic apparatus, and device manufacturing method | Sven Antoin Johan Hol, Edwin Johan Buis, Patricia Vreugdewater | 2006-08-08 |
| 7064808 | Substrate carrier and method for making a substrate carrier | Noud Jan Gilissen, Joost Jeroen Ottens, Petrus Matthijs Henricus Vosters | 2006-06-20 |
| 7012264 | Lithographic apparatus and device manufacturing method | Martinus Arnoldus Henricus Terken, Hernes Jacobs, Petrus Matthijs Henricus Vosters, Koen Jacobus Johannes Maria Zaal | 2006-03-14 |
| 6970230 | Lithographic apparatus and device manufacturing method | Petrus Matthijs Henricus Vosters, Hernes Jacobs, Peter Rutgers | 2005-11-29 |
| 6943464 | Lithographic apparatus and motor for use in the apparatus | Sven Antoin Johan Hol, Jan Van Eijk, Angelo Cesar Peter De Klerk | 2005-09-13 |
| 6879377 | Lithographic apparatus and device manufacturing method | Hernes Jacobs, Piet Vosters, Sven Antoin Johan Hol, Robert Johannes Petrus Van Diesen, David Callan | 2005-04-12 |
| 6815699 | Lithographic apparatus and device manufacturing method | Hernes Jacobs, Petrus Matthijs Henricus Vosters, Ton De Groot | 2004-11-09 |
| 6717296 | Lithographic apparatus and motor for use in the apparatus | Sven Antoin Johan Hol, Jan Van Eijk, Angelo Oscar Peter De Klerk | 2004-04-06 |
| 6337484 | Positioning device and lithographic projection apparatus comprising such a device | Erik Roelof Loopstra, Adrianus G. Bouwer, Henricus Wilhelmus Aloysius Janssen | 2002-01-08 |
| 6262796 | Positioning device having two object holders | Erik Roelof Loopstra, Gerrit Maarten Bonnema, Gerjan P. Veldhuis, Yim-Bun Patrick Kwan | 2001-07-17 |
| 5969441 | Two-dimensionally balanced positioning device with two object holders, and lithographic device provided with such a positioning device | Erik Roelof Loopstra, Gerrit Maarten Bonnema, Gerjan P. Veldhuis, Paulus M. H. Ter Beek | 1999-10-19 |