PB

Paulus M. H. Ter Beek

AL Asm Lithography: 1 patents #4 of 15Top 30%
Overall (All Time): #3,664,126 of 4,157,543Top 90%
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Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
5969441 Two-dimensionally balanced positioning device with two object holders, and lithographic device provided with such a positioning device Erik Roelof Loopstra, Gerrit Maarten Bonnema, Harmen Klaas Van Der Schoot, Gerjan P. Veldhuis 1999-10-19