Issued Patents All Time
Showing 26–39 of 39 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7224429 | Lithographic apparatus, device manufacturing method and positioning system | Edwin Johan Buis, Patricia Vreugdewater | 2007-05-29 |
| 7205741 | Planar motor initialization method, planar motor, lithographic apparatus and device manufacturing method | Wilhelmus Franciscus Johannes Simons, Henrikus Herman Marie Cox | 2007-04-17 |
| 7167234 | Actuator assembly and lithographic apparatus comprising such an actuator assembly | Henrikus Herman Marie Cox, Hernes Jacobs | 2007-01-23 |
| 7161267 | Displacement apparatus, litographic apparatus, device manufacturing method, and device manufactured thereby | Johan Cornelis Compter, Erik Roelof Loopstra, Patricia Vreugdewater | 2007-01-09 |
| 7145269 | Lithographic apparatus, Lorentz actuator, and device manufacturing method | Henrikus Herman Marie Cox, Hernes Jacobs, Patricia Vreugdewater, Koen Jacobus Johannes Maria Zaal | 2006-12-05 |
| 7095485 | Lithographic linear motor, lithographic apparatus, and device manufacturing method | Johan Cornelis Compter, Erik Roelof Loopstra, Patricia Vreugdewater | 2006-08-22 |
| 7088428 | Lithographic actuator mechanism, lithographic apparatus, and device manufacturing method | Edwin Johan Buis, Harmen Klaas Van Der Schoot, Patricia Vreugdewater | 2006-08-08 |
| 7079226 | Lithographic actuator mechanism, lithographic apparatus, and device manufacturing method | Patricia Vreugdewater, Henrikus Herman Marie Cox | 2006-07-18 |
| 7072025 | Lithographic apparatus and device manufacturing method | Henrikus Herman Marie Cox, Robertus Nicodemus Jacobus Van Ballegoij, Petrus Matthijs Henricus Vosters, Sebastiaan Maria Johannes Cornelissen | 2006-07-04 |
| 6943464 | Lithographic apparatus and motor for use in the apparatus | Jan Van Eijk, Angelo Cesar Peter De Klerk, Harmen Klaas Van Der Schoot | 2005-09-13 |
| 6906786 | Lithographic apparatus and device manufacturing method | Henrikus Herman Marie Cox, Robertus Nicodemus Jacobus Van Ballegoij, Petrus Matthijs Henricus Vosters, Sebastiaan Maria Johannes Cornelissen | 2005-06-14 |
| 6879377 | Lithographic apparatus and device manufacturing method | Hernes Jacobs, Piet Vosters, Harmen Klaas Van Der Schoot, Robert Johannes Petrus Van Diesen, David Callan | 2005-04-12 |
| 6831285 | Lithographic apparatus, magnetic support for use therein, device manufacturing method, and device manufactured thereby | Edwin Johan Buis, Robrecht De Weerdt | 2004-12-14 |
| 6717296 | Lithographic apparatus and motor for use in the apparatus | Jan Van Eijk, Angelo Oscar Peter De Klerk, Harmen Klaas Van Der Schoot | 2004-04-06 |