High force low voltage piezoelectric micromirror actuator

Assignee

• Asml Netherlands B.V.

Inventors

• Luc Haspeslagh (23 patents)
• Nitesh Pandey (55 patents)
• Ties Wouter VAN DER WOORD (7 patents)
• Halil Gökay YEGEN (1 patents)
• Guilherme Brondani Torri (3 patents)
• Sebastianus Adrianus GOORDEN (33 patents)
• Alexander Ludwig KLEIN (4 patents)
• Jim Vincent Overkamp (20 patents)
• Edgar Alberto Osorio Oliveros (4 patents)

View full patent text on Google Patents →