Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Measurement system and method for characterizing a patterning device

Measurement system and method for characterizing a patterning device

US Patent 12443115 · Granted Oct 14, 2025

Assignee

No assignee recorded.

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Object table, stage apparatus, holding method and lithographic apparatus2025
Object table, stage apparatus, holding method and lithographic apparatus2025
Fluid handling system, method and lithographic apparatus2025
Pressure control valve, a fluid handling structure for lithographic apparatus an2025
Fluid handling system, method and lithographic apparatus2025
Lithography apparatus and a method of manufacturing a device2025
Object holder, electrostatic sheet and method for making an electrostatic sheet2025
Object holder, tool and method of manufacturing an object holder2025
Imprint lithography2024
Lithographic apparatus and a method of operating the apparatus2024
Fluid handling system and lithographic apparatus2024
Lithography apparatus and device manufacturing method2023