Lithography apparatus and a method of manufacturing a device

Assignee

• Asml Netherlands B.V.

Inventors

• Erik Henricus Egidius Catharina Eummelen (39 patents)
• Frank Debougnoux (3 patents)
• Koen Cuypers (12 patents)
• Han Henricus Aldegonda Lempens (18 patents)
• Theodorus Wilhelmus Polet (25 patents)
• Jorge Alberto Vieyra Salas (12 patents)
• John Maria Bombeeck (6 patents)
• Johannes Cornelis Paulus Melman (10 patents)
• Giovanni Luca Gattobigio (24 patents)

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