Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12332573 | Method for determining defectiveness of pattern based on after development image | Marleen KOOIMAN, Maxim PISARENCO, Abraham SLACHTER, Mark John Maslow, Bernardo Andres OYARZUN RIVERA +1 more | 2025-06-17 |
| 11996267 | Particle beam apparatus, defect repair method, lithographic exposure process and lithographic system | Alexey Olegovich POLYAKOV, Teis Johan Coenen | 2024-05-28 |
| 11733614 | Method of metrology and associated apparatuses | Thomas Jarik HUISMAN, Hermanus Adrianus DILLEN | 2023-08-22 |
| 11112703 | Method of metrology and associated apparatuses | Thomas Jarik HUISMAN, Hermanus Adrianus DILLEN | 2021-09-07 |