Issued Patents All Time
Showing 26–31 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6597431 | Lithographic projection apparatus and device manufacturing method | Oscar Fransiscus Jozephus Noordman, Michael J. M. Renkens, Erik Roelof Loopstra, Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors +1 more | 2003-07-22 |
| 6512732 | Device for optically scanning information tracks on a plane using two subbeams | Martinus P. M. Bierhoff, Antonius Hermanus Maria Akkermans, Peter Coops | 2003-01-28 |
| 5854780 | Optical scanning device using a plurality of scanning spots | Willem G. Opheij | 1998-12-29 |
| 5579298 | Optical scanner having symmetry about an oblique divider | Willem G. Opheij, Heidrun Steinhauser | 1996-11-26 |
| 4861982 | Scanning optical microscope with position detection grating | Albert Smid, Antonius Hermanus Maria Akkermans, Cornelis J. P. M. Rooyackers | 1989-08-29 |
| 4845352 | Scanning differential phase contrast microscope | — | 1989-07-04 |