Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11269259 | Lithographic apparatus and a device manufacturing method | Thomas POIESZ, Bert Dirk SCHOLTEN, Dirk Willem Harberts, Lucas Henricus Johannes Stevens, Johannes Adrianus Cornelis Maria Pijnenburg +3 more | 2022-03-08 |
| 11086238 | System, a lithographic apparatus, and a method for reducing oxidation or removing oxide on a substrate support | Lucas Henricus Johannes Stevens, Nina Vladimirovna Dziomkina, Johannes Adrianus Cornelis Maria Pijnenburg | 2021-08-10 |
| 10871715 | Lithographic apparatus and a device manufacturing method | Thomas POIESZ, Bert Dirk SCHOLTEN, Dirk Willem Harberts, Lucas Henricus Johannes Stevens, Johannes Adrianus Cornelis Maria Pijnenburg +3 more | 2020-12-22 |