Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8419862 | Method for removing a contamination layer from an optical surface and arrangement therefor as well as a method for generating a cleaning gas and arrangement therefor | Dirk Heinrich Ehm, Arnold Storm, Bastiaan Theodoor Wolschrijn, Thomas Stein, Edwin te Sligte | 2013-04-16 |
| 8373846 | Radiation source, lithographic apparatus and device manufacturing method | Erik Roelof Loopstra, Gerardus Hubertus Petrus Maria Swinkels, Vadim Yevgenyevich Banine | 2013-02-12 |