| 12411424 |
Temperature conditioning system, a lithographic apparatus and a method of temperature conditioning an object |
Remco VAN DE MEERENDONK, Daniel Jozef Maria Direcks, Günes NAKIBOGLU, Nicholas Peter Waterson, Joost André KLUGKIST +6 more |
2025-09-09 |
| 11378893 |
Lithographic apparatus and device manufacturing method involving a heater |
Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Van Meer +20 more |
2022-07-05 |
| 10838310 |
Lithographic apparatus and device manufacturing method involving a heater |
Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Van Meer +20 more |
2020-11-17 |
| 10254663 |
Lithographic apparatus and device manufacturing method involving a heater |
Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Van Meer +20 more |
2019-04-09 |
| 10248033 |
Lithographic apparatus and device manufacturing method |
Jeroen Johannes Sophia Maria Mertens, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Franciscus Johannes Herman Maria Teunissen +4 more |
2019-04-02 |
| 9811007 |
Lithographic apparatus and method of cooling a component in a lithographic apparatus |
Frank Johannes Jacobus Van Boxtel, Leonarda Hendrika Van Den Heuvel |
2017-11-07 |
| 9753380 |
Lithographic apparatus and device manufacturing method |
Jeroen Johannes Sophia Maria Mertens, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Franciscus Johannes Herman Maria Teunissen +4 more |
2017-09-05 |
| 9599908 |
Lithographic apparatus and contamination removal or prevention method |
Anthonius Martinus Cornelis Petrus De Jong, Hans Jansen, Martinus Hendrikus Antonius Leenders, Peter Franciscus Wanten, Jacques Cor Johan Van Der Donck +4 more |
2017-03-21 |
| 9436097 |
Lithographic apparatus and device manufacturing method |
Jeroen Johannes Sophia Maria Mertens, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Franciscus Johannes Herman Maria Teunissen +4 more |
2016-09-06 |
| 9268242 |
Lithographic apparatus and device manufacturing method involving a heater and a temperature sensor |
Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Vermeer +20 more |
2016-02-23 |
| 9188880 |
Lithographic apparatus and device manufacturing method involving a heater |
Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Vermeer +20 more |
2015-11-17 |
| 9158206 |
Lithographic apparatus and contamination removal or prevention method |
Anthonius Martinus Cornelis Petrus De Jong, Hans Jansen, Martinus Hendrikus Antonius Leenders, Peter Franciscus Wanten, Jacques Cor Johan Van Der Donck +4 more |
2015-10-13 |
| 9004459 |
Humidifying apparatus, lithographic apparatus and humidifying method |
— |
2015-04-14 |
| 8934082 |
Lithographic apparatus and device manufacturing method |
Jeroen Johannes Sophia Maria Mertens, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Franciscus Johannes Herman Maria Teunissen +4 more |
2015-01-13 |
| 8885142 |
Lithographic apparatus and device manufacturing method |
— |
2014-11-11 |
| 8810769 |
Lithographic apparatus, an illumination system, a projection system and a method of manufacturing a device using a lithographic apparatus |
Jeroen Gerard Gosen, Bart Dinand Paarhuis, Frank Johannes Jacobus Van Boxtel, Jinggao Li |
2014-08-19 |
| 8564757 |
Lithographic apparatus and a method of operating the apparatus |
Bauke Jansen, Richard Joseph Bruls, Hans Jansen, Pieter Jacob Kramer, Anthonie Kuijper +2 more |
2013-10-22 |
| 8446561 |
Lithographic apparatus and a method of measuring flow rate in a two phase flow |
Pieter Jacob Kramer, Erik Henricus Egidius Catharina Eummelen, Anthonie Kuijper |
2013-05-21 |
| 8432531 |
Lithographic apparatus and a method of operating the apparatus |
Kornelis Tijmen Hoekerd, Roelof Frederik De Graaf, Hans Jansen, Martinus Hendrikus Antonius Leenders, Pieter Jacob Kramer +4 more |
2013-04-30 |
| 8004652 |
Lithographic apparatus and device manufacturing method |
Jeroen Johannes Sophia Maria Mertens, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Franciscus Johannes Herman Maria Teunissen +4 more |
2011-08-23 |
| 7924404 |
Lithographic apparatus and device manufacturing method |
— |
2011-04-12 |
| 7916269 |
Lithographic apparatus and contamination removal or prevention method |
Anthonius Martinus Cornelis Petrus De Jong, Hans Jansen, Martinus Hendrikus Antonius Leenders, Peter Franciscus Wanten, Jacques Cor Johan Van Der Donck +4 more |
2011-03-29 |
| 7866637 |
Humidifying apparatus, lithographic apparatus and humidifying method |
— |
2011-01-11 |
| 7804575 |
Lithographic apparatus and device manufacturing method having liquid evaporation control |
Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Vermeer +20 more |
2010-09-28 |
| 7379155 |
Lithographic apparatus and device manufacturing method |
Jeroen Johannes Sophia Maria Mertens, Sjoerd Nicolaas Lambertus Donders, Roelof Frederick De Graaf, Christiaan Alexander Hoogendam, Franciscus Johaannes Herman Maria Teunissen +4 more |
2008-05-27 |