| 10712675 |
Immersion liquid, exposure apparatus, and exposure process |
Hans Jansen, Marco Koert Stavenga, Jacobus Johannus Leonardus Hendricus Verspay, Franciscus Johannes Joseph Janssen |
2020-07-14 |
| 10018925 |
Lithographic apparatus, drying device, metrology apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Nicolaas Ten Kate, Joost Jeroen Ottens, Marcel Beckers, Marco Polizzi +4 more |
2018-07-10 |
| 9772565 |
Immersion liquid, exposure apparatus, and exposure process |
Hans Jansen, Marco Koert Stavenga, Jacobus Johannus Leonardus Hendricus Verspay, Franciscus Johannes Joseph Janssen |
2017-09-26 |
| 9606429 |
Lithographic apparatus, drying device, metrology apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Nicolaas Ten Kate, Joost Jeroen Ottens, Marcel Beckers, Marco Polizzi +4 more |
2017-03-28 |
| 9454088 |
Immersion liquid, exposure apparatus, and exposure process |
Hans Jansen, Marco Koert Stavenga, Jacobus Johannus Leonardus Hendricus Verspay, Franciscus Johannes Joseph Janssen |
2016-09-27 |
| 9164391 |
Immersion liquid, exposure apparatus, and exposure process |
Hans Jansen, Marco Koert Stavenga, Jacobus Johannus Leonardus Hendricus Verspay, Franciscus Johannes Joseph Janssen |
2015-10-20 |
| 8988657 |
Lithographic apparatus and device manufacturing method |
Frank Johannes Jacobus Van Boxtel, Jeroen Gerard Gosen, Arjan Hubrecht Josef Anna Martens, Jean-Philippe Xavier Van Damme, Peter Schoenmakers +4 more |
2015-03-24 |
| 8953142 |
Lithographic apparatus, drying device, metrology apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Nicolaas Ten Kate, Joost Jeroen Ottens, Marcel Beckers, Marco Polizzi +4 more |
2015-02-10 |
| 8859188 |
Immersion liquid, exposure apparatus, and exposure process |
Hans Jansen, Marco Koert Stavenga, Jacobus Johannus Leonardus Hendricus Verspay, Franciscus Johannes Joseph Janssen |
2014-10-14 |
| 8564757 |
Lithographic apparatus and a method of operating the apparatus |
Bauke Jansen, Richard Joseph Bruls, Hans Jansen, Antonius Johannus Van Der Net, Pieter Jacob Kramer +2 more |
2013-10-22 |
| 8446561 |
Lithographic apparatus and a method of measuring flow rate in a two phase flow |
Pieter Jacob Kramer, Antonius Johannus Van Der Net, Erik Henricus Egidius Catharina Eummelen |
2013-05-21 |
| 8432531 |
Lithographic apparatus and a method of operating the apparatus |
Kornelis Tijmen Hoekerd, Roelof Frederik De Graaf, Hans Jansen, Martinus Hendrikus Antonius Leenders, Antonius Johannus Van Der Net +4 more |
2013-04-30 |
| 8054445 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Christiaan Alexander Hoogendam, Timotheus Franciscus Sengers |
2011-11-08 |