Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10613445 | Methods and apparatus for obtaining diagnostic information relating to a lithographic manufacturing process | Marc Hauptmann, Dylan John David Davies, Paul Janssen, Naoko Tsugama, Richard Joseph Bruls +5 more | 2020-04-07 |
| 10437156 | Lithographic apparatus and surface cleaning method | Takeshi Kaneko | 2019-10-08 |
| 10241418 | Method and apparatus for obtaining diagnostic information relating to a lithographic manufacturing process, lithographic processing system including diagnostic apparatus | Marc Hauptmann, Dylan John David Davies, Paul Janssen, Naoko Tsugama, Richard Joseph Bruls +5 more | 2019-03-26 |
| 10185223 | Lithographic apparatus and surface cleaning method | Takeshi Kaneko | 2019-01-22 |
| 9927716 | Lithographic apparatus and surface cleaning method | Takeshi Kaneko | 2018-03-27 |
| 9645508 | Lithographic apparatus and surface cleaning method | Takeshi Kaneko | 2017-05-09 |
| 9261796 | Lithographic apparatus and surface cleaning method | Takeshi Kaneko | 2016-02-16 |
| 9013672 | Cleaning device, a lithographic apparatus and a lithographic apparatus cleaning method | Anthonius Martinus Cornelis Petrus De Jong, Hans Jansen, Marco Koert Stavenga, Peter Franciscus Wanten, Bauke Jansen +2 more | 2015-04-21 |
| 8947629 | Cleaning device, a lithographic apparatus and a lithographic apparatus cleaning method | Anthonius Martinus Cornelis Petrus De Jong, Hans Jansen, Marco Koert Stavenga, Peter Franciscus Wanten, Bauke Jansen +2 more | 2015-02-03 |
| 8760616 | Lithographic apparatus and surface cleaning method | Takeshi Kaneko | 2014-06-24 |
| 8432531 | Lithographic apparatus and a method of operating the apparatus | Roelof Frederik De Graaf, Hans Jansen, Martinus Hendrikus Antonius Leenders, Antonius Johannus Van Der Net, Pieter Jacob Kramer +4 more | 2013-04-30 |
| 8011377 | Cleaning device and a lithographic apparatus cleaning method | Anthonius Martinus Cornelis Petrus De Jong, Hans Jansen, Marco Koert Stavenga, Peter Franciscus Wanten, Bauke Jansen +2 more | 2011-09-06 |
| 7900641 | Cleaning device and a lithographic apparatus cleaning method | Anthonius Martinus Cornelis Petrus De Jong, Hans Jansen, Marco Koert Stavenga, Peter Franciscus Wanten, Bauke Jansen +2 more | 2011-03-08 |
| 7866330 | Cleaning device, a lithographic apparatus and a lithographic apparatus cleaning method | Bauke Jansen, Raymond Gerardus Marius Beeren, Anthonius Martinus Cornelis Petrus De Jong | 2011-01-11 |
| 7841352 | Cleaning device, a lithographic apparatus and a lithographic apparatus cleaning method | Bauke Jansen, Raymond Gerardus Marius Beeren, Anthonius Martinus Cornelis Petrus De Jong | 2010-11-30 |