| 9599908 |
Lithographic apparatus and contamination removal or prevention method |
Anthonius Martinus Cornelis Petrus De Jong, Hans Jansen, Martinus Hendrikus Antonius Leenders, Antonius Johannus Van Der Net, Jacques Cor Johan Van Der Donck +4 more |
2017-03-21 |
| 9158206 |
Lithographic apparatus and contamination removal or prevention method |
Anthonius Martinus Cornelis Petrus De Jong, Hans Jansen, Martinus Hendrikus Antonius Leenders, Antonius Johannus Van Der Net, Jacques Cor Johan Van Der Donck +4 more |
2015-10-13 |
| 9013672 |
Cleaning device, a lithographic apparatus and a lithographic apparatus cleaning method |
Anthonius Martinus Cornelis Petrus De Jong, Hans Jansen, Marco Koert Stavenga, Bauke Jansen, Johannes Wilhelmus Jacobus Leonardus Cuijpers +2 more |
2015-04-21 |
| 8947629 |
Cleaning device, a lithographic apparatus and a lithographic apparatus cleaning method |
Anthonius Martinus Cornelis Petrus De Jong, Hans Jansen, Marco Koert Stavenga, Bauke Jansen, Johannes Wilhelmus Jacobus Leonardus Cuijpers +2 more |
2015-02-03 |
| 8514365 |
Lithographic apparatus and device manufacturing method |
Frederik Eduard De Jong, Marcel Hendrikus Maria Beems, Marinus Aart Van Den Brink, Johannes Henricus Wilhelmus Jacobs, Martinus Hendrikus Antonius Leenders +10 more |
2013-08-20 |
| 8011377 |
Cleaning device and a lithographic apparatus cleaning method |
Anthonius Martinus Cornelis Petrus De Jong, Hans Jansen, Marco Koert Stavenga, Bauke Jansen, Johannes Wilhelmus Jacobus Leonardus Cuijpers +2 more |
2011-09-06 |
| 7969548 |
Lithographic apparatus and lithographic apparatus cleaning method |
Marco Koert Stavenga, Hans Jansen, Johannes Wilhelmus Jacobus Leonardus Cuijpers, Raymond Gerardus Marius Beeren |
2011-06-28 |
| 7916269 |
Lithographic apparatus and contamination removal or prevention method |
Anthonius Martinus Cornelis Petrus De Jong, Hans Jansen, Martinus Hendrikus Antonius Leenders, Antonius Johannus Van Der Net, Jacques Cor Johan Van Der Donck +4 more |
2011-03-29 |
| 7900641 |
Cleaning device and a lithographic apparatus cleaning method |
Anthonius Martinus Cornelis Petrus De Jong, Hans Jansen, Marco Koert Stavenga, Bauke Jansen, Johannes Wilhelmus Jacobus Leonardus Cuijpers +2 more |
2011-03-08 |