Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9575406 | Pump system, a carbon dioxide supply system, an extraction system, a lithographic apparatus and a device manufacturing method | Marc Léon Van Der Gaag, Leonarda Hendrika Van Den Heuvel, Frank Johannes Jacobus Van Boxtel | 2017-02-21 |
| 8988657 | Lithographic apparatus and device manufacturing method | Frank Johannes Jacobus Van Boxtel, Jeroen Gerard Gosen, Anthonie Kuijper, Jean-Philippe Xavier Van Damme, Peter Schoenmakers +4 more | 2015-03-24 |
| 8564757 | Lithographic apparatus and a method of operating the apparatus | Bauke Jansen, Richard Joseph Bruls, Hans Jansen, Antonius Johannus Van Der Net, Pieter Jacob Kramer +2 more | 2013-10-22 |
| 8508711 | Lithographic apparatus and device manufacturing method | Martinus Cornelis Maria Verhagen, Pieter Jacob Kramer, Hubertus Leonardus Franciscus Heusschen | 2013-08-13 |
| 8432531 | Lithographic apparatus and a method of operating the apparatus | Kornelis Tijmen Hoekerd, Roelof Frederik De Graaf, Hans Jansen, Martinus Hendrikus Antonius Leenders, Antonius Johannus Van Der Net +4 more | 2013-04-30 |
| 8319157 | Lithographic apparatus and device manufacturing method | Pieter Jacob Kramer | 2012-11-27 |