Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10281830 | Patterning device cooling systems in a lithographic apparatus | Laurentius Johannes Adrianus Van Bokhoven, Christopher Charles Ward, Johan Gertrudis Cornelis Kunnen | 2019-05-07 |
| 9575406 | Pump system, a carbon dioxide supply system, an extraction system, a lithographic apparatus and a device manufacturing method | Leonarda Hendrika Van Den Heuvel, Arjan Hubrecht Josef Anna Martens, Frank Johannes Jacobus Van Boxtel | 2017-02-21 |