Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7310789 | Use of overlay diagnostics for enhanced automatic process control | Joel Seligson, Mark Ghinovker, John Robinson, Pavel Izikson, Michael Adel +2 more | 2007-12-18 |
| 7111256 | Use of overlay diagnostics for enhanced automatic process control | Joel Seligson, Mark Ghinovker, John Robinson, Pavel Izikson, Michael Adel +2 more | 2006-09-19 |
| 6928628 | Use of overlay diagnostics for enhanced automatic process control | Joel Seligson, Mark Ghinovker, John Robinson, Pavel Izikson, Michael Adel +1 more | 2005-08-09 |