| 12085863 |
Method for determining stochastic variation associated with desired pattern |
— |
2024-09-10 |
| 11669019 |
Method for determining stochastic variation associated with desired pattern |
— |
2023-06-06 |
| 10234271 |
Method and system for spectroscopic beam profile metrology including a detection of collected light according to wavelength along a third dimension of a hyperspectral detector |
Noam Sapiens, Kevin Peterlinz, Stilian Ivanov Pandev |
2019-03-19 |
| 10101676 |
Spectroscopic beam profile overlay metrology |
Noam Sapiens, Kevin Peterlinz, Stilian Ivanov Pandev |
2018-10-16 |
| 10072921 |
Methods and systems for spectroscopic beam profile metrology having a first two dimensional detector to detect collected light transmitted by a first wavelength dispersive element |
Noam Sapiens, Kevin Peterlinz, Stilian Ivanov Pandev |
2018-09-11 |
| 9739719 |
Measurement systems having linked field and pupil signal detection |
Noam Sapiens |
2017-08-22 |
| 7903250 |
Control by sample reflectivity |
Fabio A. Faccini, Torsten R. Kaack, Zhiming Jiang |
2011-03-08 |
| 7277172 |
Measuring overlay and profile asymmetry using symmetric and anti-symmetric scatterometry signals |
Daniel Kandel, Kenneth P. Gross, Michael Friedmann, Shakar Krishnan, Boris Golovanevsky |
2007-10-02 |